국제학술지
Online temperature monitoring system for semiconductor automated test equipment using local Gaussian process
Research summary
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인용 정보
(2026). Online temperature monitoring system for semiconductor automated test equipment using local Gaussian process. IEEE Transactions on Semiconductor Manufacturing, 39(2), 256–265.
BibTeX
@article{LST_temperature_2026,
title = {Online temperature monitoring system for semiconductor automated test equipment using local Gaussian process},
author = {Kim, J. and Baik, S. M. and Yu, D. and Kim, J. and Ko, Y. M.},
journal = {IEEE Transactions on Semiconductor Manufacturing},
year = {2026},
doi = {10.1109/TSM.2026.3665465},
url = {https://doi.org/10.1109/TSM.2026.3665465}
}
